Door of Semiconductor Equipment

This interlocking device prevents equipment from starting or operating if a door or cover is open (if the operator safety is not ensured), which is called "Safety Confirmation Type."
SS2 series is designed to ensure safety with features such as disable prevention, built-in protection fuses, and anomaly detection.
Furthermore, since it is non-contact, there is no dust generation due to wear, making it ideal for use in clean environments.